sputtering yield

Calculations of sputtering yield of high Z materials target using a new local model

用新局域模型计算高Z靶的溅射产额

When the incident energy is higher than the threshold energy, however, the sputtering yield increases with the increase of the incident energy.

当入射原子的能量大于溅射阈值时，溅射产额随入射原子能量的增加而线性增大；

Study on Sputtering Yield in Reactive Sputtering

反应溅射中的溅射产额研究

Calculation of Total Sputtering Yield and Etching Rate on Binary Compound

二元化合物总原子溅射率和刻蚀速率的经验公式

Tungsten ( W) is presently a so good candidate plasma facing material for nuclear fusion reactor because of its high melting point, high thermal conductivity, low sputtering yield and low tritium retention capability.

钨具有高熔点、高导热、低溅射产额和低氚滞留性能，是核聚变堆最有希望的面对等离子体第一壁材料。